Numerical Analysis and Optimization of Internal Flow Field in Optical Module of DUV Laser

DOI

10.2991/mme-16.2017.138How to use a DOI?

Keywords

CFD, DUV laser, Flow field.

Abstract

In this paper, the internal flow field in an optical module of DUV laser was analyzed by ANSYS Fluent based on the finite volume method. The way of purging nitrogen was optimized according to the results of the analysis. After the optimization, a better nitrogen purge method was obtained, and a flow field with uniform velocity and low turbulence energy was obtained on the laser transmission path. The results of this paper can provide a reference for the design of the gas purge system of DUV laser.

Copyright

© 2017, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Bin Liu
AU  - Jin-Bin Ding
AU  - Kui-Bo Wang
AU  - Peng-Fei Sha
AU  - Yi Zhou
AU  - Yu Wang
PY  - 2016/12
DA  - 2016/12
TI  - Numerical Analysis and Optimization of Internal Flow Field in Optical Module of DUV Laser
BT  - Proceedings of the 3rd Annual International Conference on Mechanics and Mechanical Engineering (MME 2016)
PB  - Atlantis Press
SP  - 981
EP  - 986
SN  - 2352-5401
UR  - https://doi.org/10.2991/mme-16.2017.138
DO  - 10.2991/mme-16.2017.138
ID  - Liu2016/12
ER  -