Electromechanical Coupled Non-linear Dynamics for Micro Plate Simply supported on four Sides

DOI

10.2991/mems.2012.138How to use a DOI?

Keywords

micro plate; MEMS; non-linear dynamics; small deflection theory; Linz Ted-Poincare method

Abstract

Dynamic characteristic of the micro plate under the micro scale effect shows non-linear features, traditional linear analysis methods can not satisfy the design precision of MEMS system, and non-linear dynamics analysis method provides an effective solution. In this paper, based on the small deflection theory and electrostatics theory, take typical boundary condition of the micro plate simply supported on four sides as example, the basic differential equation of lateral vibration is established, using Linz Ted-Poincare method, displacement and time course of forced vibration, time responses of forced vibration are calculated. The research results provide theoretical basis for optimizing the system parameters, improving the ability to resist interferences and increases the reliability.

Copyright

© 2012, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Download article (PDF)

TY  - CONF
AU  - Sun Libo
AU  - Xu Lizhong
PY  - 2012/12
DA  - 2012/12
TI  - Electromechanical Coupled Non-linear Dynamics for Micro Plate Simply supported on four Sides
BT  - Proceedings of the 1st International Conference on Mechanical Engineering and Material Science (MEMS 2012)
PB  - Atlantis Press
SP  - 525
EP  - 528
SN  - 1951-6851
UR  - https://doi.org/10.2991/mems.2012.138
DO  - 10.2991/mems.2012.138
ID  - Libo2012/12
ER  -