Optical emission Spectral analysis of pulse modulated plasma

DOI

10.2991/isaeece-17.2017.70How to use a DOI?

Keywords

OES; PMT; high time resolution; Pulse modulated plasma

Abstract

Microelectronics manufacturing standards are increasingly demanding, plasma etching process is facing 22nm or even smaller size of the node, which requires higher requirements on plasma processing technology. Pulse modulated plasma has been used since it has more advantages than traditional RF plasma. Pulse modulation plasma is difficult to measure due to the high frequency and the single pulse period is short, and optical emission spectroscopy (OES)is non-immersion test analysis means, in the plasma physics, atomic and molecular physics research has a wide range of applications. For non-constant states of the plasma, the emission spectrum also changes with time, and some of them change rapidly, such as pulse-modulated plasma, the current main photodetector ICCD camera and photoelectric multiplier tube (PMT) cannot meet the requirements, it is difficult to carry out effective measurement. In order to understand the complex physical and chemical processes in the plasma, a spectral analysis system based on PMT array was constructed based on the advantages of ICCD camera and photomultiplier tube. This paper mainly introduces the principle of spectrum analysis system based on PMT array, and uses this system to measure and analyze pulse modulation plasma.

Copyright

© 2017, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Download article (PDF)

TY  - CONF
AU  - Longhu Deng
AU  - Weifeng Liu
AU  - Yijia Lu
PY  - 2017/03
DA  - 2017/03
TI  - Optical emission Spectral analysis of pulse modulated plasma
BT  - Proceedings of the 2017 2nd International Symposium on Advances in Electrical, Electronics and Computer Engineering (ISAEECE 2017)
PB  - Atlantis Press
SP  - 364
EP  - 367
SN  - 2352-5401
UR  - https://doi.org/10.2991/isaeece-17.2017.70
DO  - 10.2991/isaeece-17.2017.70
ID  - Deng2017/03
ER  -