Characteristics of double planar thin film inductor with Ni-based magnetic film for DC/DC integration
Authors
Mingming Chen, Guifu Ding, Mengyuan Zhao
Corresponding Author
Mingming Chen
Available Online April 2016.
- DOI
- 10.2991/isaeece-16.2016.22How to use a DOI?
- Keywords
- double planar, film inductor, micromachining, magnetic thin film
- Abstract
This paper mainly describes the design, fabrication and test of double planar thin film inductor. The thin film inductor has a sandwich structure, which consists of a double-square spiral planar Cu coil between top and bottom Ni magnetic thin films on a glass substrate; it is fabricated by dry and wet processes. The inductor is 2.7 x 1.9 mm2 in area which is suitable for a MHz switching DC - DC converter integration. The finally measurement shows that inductance of 0.71uH constant up to 1.5MHz, and a quality factor of 1.09 at 1.5 MHz.
- Copyright
- © 2016, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Mingming Chen AU - Guifu Ding AU - Mengyuan Zhao PY - 2016/04 DA - 2016/04 TI - Characteristics of double planar thin film inductor with Ni-based magnetic film for DC/DC integration BT - Proceedings of the 2016 International Symposium on Advances in Electrical, Electronics and Computer Engineering PB - Atlantis Press SP - 103 EP - 106 SN - 2352-5401 UR - https://doi.org/10.2991/isaeece-16.2016.22 DO - 10.2991/isaeece-16.2016.22 ID - Chen2016/04 ER -