Development of a Capacitive Pressure Sensor Based on Havar Alloy Diaphragm

DOI

10.2991/ifmeita-17.2018.84How to use a DOI?

Keywords

Capacitive pressure sensor, Sensing diaphragm, Havar alloy, ANSYS Workbench

Abstract

This paper proposes a new pressure sensor using Havar alloy film as the sensing diaphragm, which has higher strength and toughness, better corrosion resistance and magnetic resistance as compared to traditional films. 2D distribution graphs of stress and strain of the diaphragm under a given pressure are analyzed with ANSYS Workbench. The diaphragm sensitivity and nonlinear error can be calculated by constructing the curve of the displacement of diaphragm center varied with input pressures. Two key parameters, thickness and diameter of the diaphragm are solved by minimizing the nonlinear error of diaphragm. C/F and F/V conversion techniques are used in capacitance detection circuit for converting weak capacitive signal to voltage signal. A prototype sensor is constructed and the calibration experiment is conducted. Calibration data analyzing shows that the linearity of the pressure sensor is 0.03% in the working range of 0 to 35kPa, which indicates that the proposed capacitive pressure sensor using Havar alloy diaphragm possesses high accuracy.

Copyright

© 2018, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Shoubin Liu
AU  - Bingwu Zhang
PY  - 2018/02
DA  - 2018/02
TI  - Development of a Capacitive Pressure Sensor Based on Havar Alloy Diaphragm
BT  - Proceedings of the 2nd International Forum on Management, Education and Information Technology Application (IFMEITA 2017)
PB  - Atlantis Press
SP  - 486
EP  - 491
SN  - 2352-5398
UR  - https://doi.org/10.2991/ifmeita-17.2018.84
DO  - 10.2991/ifmeita-17.2018.84
ID  - Liu2018/02
ER  -