Research of Resonator Fabrication Technology Based on Silicon Resonant Pressure Sensor

DOI

10.2991/ifmeita-17.2018.46How to use a DOI?

Keywords

Resonant pressure sensor, Resonator, Reactive ion etching, wet chemical etching, Self-etch-stop etching.

Abstract

The research of beam resonator fabrication technology has been done by using reactive ion etching, wet chemical etching and self-etch-stop etching. The difficulties of hollowing out resonator have been solved. The butterfly-shaped beam resonator of resonant pressure sensor is obtained, the other measurement are under the way.

Copyright

© 2018, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Yide Peng
AU  - Zhengyuan Zhang
AU  - Chunhai Zhang
PY  - 2018/02
DA  - 2018/02
TI  - Research of Resonator Fabrication Technology Based on Silicon Resonant Pressure Sensor
BT  - Proceedings of the 2nd International Forum on Management, Education and Information Technology Application (IFMEITA 2017)
PB  - Atlantis Press
SP  - 269
EP  - 272
SN  - 2352-5398
UR  - https://doi.org/10.2991/ifmeita-17.2018.46
DO  - 10.2991/ifmeita-17.2018.46
ID  - Peng2018/02
ER  -