Proceedings of the 2015 6th International Conference on Manufacturing Science and Engineering

The Design of Normally-off 1300V 4H-SiC VJFET

Authors
Gang Chen, Yonghong Tao, Song Bai, Ao Liu, Runhua Huang, Lin Wang, Yun Li, Zhifei Zhao
Corresponding Author
Gang Chen
Available Online December 2015.
DOI
10.2991/icmse-15.2015.248How to use a DOI?
Keywords
4H-SiC, VJFET, ohmic, trench, implant
Abstract

Results are presented for the silicon carbide (SiC) vertical channel junction field effect transistor (VJFET) fabricated based on in-house SiC epitaxial wafer suitable for power devices. The Normally-off 1300V SiC VJFET device’s current density is 260 A/cm2 and current is 8 A at VG= 7 V and VD = 2 V, with related specific on-resistance 7.56 m •cm2. The device exceeds 1300 V at gate bias VG = 0 V.

Copyright
© 2015, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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Volume Title
Proceedings of the 2015 6th International Conference on Manufacturing Science and Engineering
Series
Advances in Engineering Research
Publication Date
December 2015
ISBN
978-94-6252-137-7
ISSN
2352-5401
DOI
10.2991/icmse-15.2015.248How to use a DOI?
Copyright
© 2015, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Cite this article

TY  - CONF
AU  - Gang Chen
AU  - Yonghong Tao
AU  - Song Bai
AU  - Ao Liu
AU  - Runhua Huang
AU  - Lin Wang
AU  - Yun Li
AU  - Zhifei Zhao
PY  - 2015/12
DA  - 2015/12
TI  - The Design of Normally-off 1300V 4H-SiC VJFET
BT  - Proceedings of the 2015 6th International Conference on Manufacturing Science and Engineering
PB  - Atlantis Press
SP  - 1370
EP  - 1373
SN  - 2352-5401
UR  - https://doi.org/10.2991/icmse-15.2015.248
DO  - 10.2991/icmse-15.2015.248
ID  - Chen2015/12
ER  -