Construction and experiment on micro-gyroscope detection balance loop

DOI

10.2991/icmse-15.2015.179How to use a DOI?

Keywords

micro-gyroscope; detection balance loop; Coriolis effect; closed-loop control

Abstract

In order to overcome the defect of open-loop detection of micro-gyroscope, based on comb capacitance detection of micro-structure, the working principle of electrostatic force suppressing capacitance comb vibration was analyzed. The Coriolis signal vibration amplitude of micro-gyroscope was extracted; with the Coriolis vibration amplitude as the control variable, the detection balance loop of micro-gyroscope was constructed. The experimental result shows that the constructed detection balance loop is able to balance the Coriolis force and suppress the Coriolis vibration. The scale factor linearity and symmetry have greatly enhanced, and the measurement range, the threshold and resolution have improved at some extent.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Xiaolei Wang
AU  - Xiangyang Zhao
AU  - Lingzhi Cao
AU  - Yucui Liu
AU  - Jitao Zhang
PY  - 2015/12
DA  - 2015/12
TI  - Construction and experiment on micro-gyroscope detection balance loop
BT  - Proceedings of the 2015 6th International Conference on Manufacturing Science and Engineering
PB  - Atlantis Press
SP  - 988
EP  - 992
SN  - 2352-5401
UR  - https://doi.org/10.2991/icmse-15.2015.179
DO  - 10.2991/icmse-15.2015.179
ID  - Wang2015/12
ER  -