Research of Anti-reflective and Protective Symmetrical DLC Films Deposited by Pulsed Laser

DOI

10.2991/icmse-15.2015.158How to use a DOI?

Keywords

Diamond like carbon film; Pulsed laser deposition; Anti-reflective; Symmetric film on large area

Abstract

Femtosecond pulsed laser(800nm, 120fs, 1000Hz) was used. And methods of element doping, abaxially rolling and moving were applied. Problems of conflict between transmission and inner-stress, and large area asymmetric of diamond like carbon (DLC) films deposited by pulsed laser were overcome. Hydrogen-free DLC film was deposited on silicon substrates. The transmission at 3-5 m of the silicon sample coated by DLC film on one side was larger than 68%. The nano-hardness was up to 40-50GPa. Asymmetry of DLC film in size of 125mm was smaller than 2%. Furthermore there was no nicks on the film after rubbed 105 times by 9.8N rubber.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Shuyun Wang
AU  - Xu Liu
AU  - Weibing Bai
PY  - 2015/12
DA  - 2015/12
TI  - Research of Anti-reflective and Protective Symmetrical DLC Films Deposited by Pulsed Laser
BT  - Proceedings of the 2015 6th International Conference on Manufacturing Science and Engineering
PB  - Atlantis Press
SP  - 877
EP  - 880
SN  - 2352-5401
UR  - https://doi.org/10.2991/icmse-15.2015.158
DO  - 10.2991/icmse-15.2015.158
ID  - Wang2015/12
ER  -