A Calculation Method for the Micro-vibration Amplitude of an Aerostatic Thrust Bearing and the Influence of Bearing Parameters on the Vibration

DOI

10.2991/icmia-16.2016.1How to use a DOI?

Keywords

Aerostatic thrust bearing; Micro-vibration; Large Eddy Simulation (LES); Macro-vibration; Calculation method

Abstract

The micro-vibration caused by the locally unstable gas flow field of an aerostatic thrust bearing does always occur even if an invariable load acts on the bearing, which is harmful to the accuracy of an ultra-precision measuring device or manufacturing equipment. However, most researchers forecasted the vibration amplitude qualitatively. In this paper, Large Eddy Simulation (LES) was used to calculate the time-variation flow field of an aerostatic thrust bearing, and bearing force, stiffness and the fluctuant gas pressure on bearing surface were obtained. Further, a micro-vibration model was established and a method was proposed for calculation of the vibration amplitude. Experiments showed that the vibration could be forecasted quantificationally. In addition, the influence of bearing parameters on the vibration amplitude was analyzed numerically. The results indicated that the micro-vibration could be restrained if the bearing was featured with a large orifice diameter, a large bearing diameter, a shallow air chamber or a small air chamber diameter.

Copyright

© 2016, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Yuntang Li
AU  - Xin Wan
AU  - Xiaolu Li
AU  - Weihong Sun
AU  - Zai Sun
PY  - 2016/11
DA  - 2016/11
TI  - A Calculation Method for the Micro-vibration Amplitude of an Aerostatic Thrust Bearing and the Influence of Bearing Parameters on the Vibration
BT  - Proceedings of the 2016 5th International Conference on Measurement, Instrumentation and Automation (ICMIA 2016)
PB  - Atlantis Press
SP  - 1
EP  - 9
SN  - 1951-6851
UR  - https://doi.org/10.2991/icmia-16.2016.1
DO  - 10.2991/icmia-16.2016.1
ID  - Li2016/11
ER  -