Proceedings of the 2nd International Conference on Computer Science and Electronics Engineering (ICCSEE 2013)

High-precision absolute laser interferometer distance measurement system

Authors
Chen-yang Zhang, Shao-lan Zhu, Hao-dong He, Bing Li
Corresponding Author
Chen-yang Zhang
Available Online March 2013.
DOI
10.2991/iccsee.2013.70How to use a DOI?
Keywords
Absolute distance metrology, high-precision,Tunable laser, Interferometer, Subdivision
Abstract

With the improvement of precision in various fields, we increase high requirements for measurement accuracy. In this paper, we obtain the interference fringes change information (the distance information) with the help of laser scanning with different frequency. This interference method is an absolute measurement. It does not require the target to move in the direction of measurement. In this paper, we give a detailed analysis of the theory. We have done experiments to compare this new method’s results with the results of RENISHAW interferometer. It’s improved that the accuracy of distance measurement is 10-4~10-5 relatively.

Copyright
© 2013, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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Volume Title
Proceedings of the 2nd International Conference on Computer Science and Electronics Engineering (ICCSEE 2013)
Series
Advances in Intelligent Systems Research
Publication Date
March 2013
ISBN
978-90-78677-61-1
ISSN
1951-6851
DOI
10.2991/iccsee.2013.70How to use a DOI?
Copyright
© 2013, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Cite this article

TY  - CONF
AU  - Chen-yang Zhang
AU  - Shao-lan Zhu
AU  - Hao-dong He
AU  - Bing Li
PY  - 2013/03
DA  - 2013/03
TI  - High-precision absolute laser interferometer distance measurement system
BT  - Proceedings of the 2nd International Conference on Computer Science and Electronics Engineering (ICCSEE 2013)
PB  - Atlantis Press
SP  - 274
EP  - 276
SN  - 1951-6851
UR  - https://doi.org/10.2991/iccsee.2013.70
DO  - 10.2991/iccsee.2013.70
ID  - Zhang2013/03
ER  -