High-precision absolute laser interferometer distance measurement system
Authors
Chen-yang Zhang, Shao-lan Zhu, Hao-dong He, Bing Li
Corresponding Author
Chen-yang Zhang
Available Online March 2013.
- DOI
- 10.2991/iccsee.2013.70How to use a DOI?
- Keywords
- Absolute distance metrology, high-precision,Tunable laser, Interferometer, Subdivision
- Abstract
With the improvement of precision in various fields, we increase high requirements for measurement accuracy. In this paper, we obtain the interference fringes change information (the distance information) with the help of laser scanning with different frequency. This interference method is an absolute measurement. It does not require the target to move in the direction of measurement. In this paper, we give a detailed analysis of the theory. We have done experiments to compare this new method’s results with the results of RENISHAW interferometer. It’s improved that the accuracy of distance measurement is 10-4~10-5 relatively.
- Copyright
- © 2013, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Chen-yang Zhang AU - Shao-lan Zhu AU - Hao-dong He AU - Bing Li PY - 2013/03 DA - 2013/03 TI - High-precision absolute laser interferometer distance measurement system BT - Proceedings of the 2nd International Conference on Computer Science and Electronics Engineering (ICCSEE 2013) PB - Atlantis Press SP - 274 EP - 276 SN - 1951-6851 UR - https://doi.org/10.2991/iccsee.2013.70 DO - 10.2991/iccsee.2013.70 ID - Zhang2013/03 ER -