Fabrication and Magnetic Properties of FeCoB–O Soft Magnetic Thin Films

DOI

10.2991/icadme-15.2015.387How to use a DOI?

Keywords

Reactive magnetron sputtering, nano-granular film, high frequency characteristics

Abstract

Thin films of FeCoB-O were deposited by reactive magnetron sputtering in a Ar + O2 atmosphere with the oxygen partial pressure RO2 varied. The dependence of soft magnetic properties and high frequency characteristics on oxygen partial pressure were investigated systematically. With the increase in RO2 from 1.1% to 1.5%, the films exhibited small coercivity Hc and large in-plane uniaxial anisotropy field Hk. A largest Hk value of 70 Oe was obtained for the sample of RO2 = 1.3% with Hc = 7.1 Oe, a saturation magnetization 4 Ms = 10.2 kG and a resistivity = 3638 •cm were consistently obtained, resulting in excellent high frequency characteristics, such as high ferromagnetic resonance frequency of 3.0 GHz combined with a large real part of complex permeability of 145, implying that the film is promising for high frequency applications. Such good soft magnetic properties are ascribed to the exchange coupling among magnetic particles.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Huaping Zuo
AU  - Shihui Ge
AU  - Feng Zhang
AU  - Guowei Wang
AU  - Min Xu
AU  - Lei Zhao
PY  - 2015/10
DA  - 2015/10
TI  - Fabrication and Magnetic Properties of FeCoB–O Soft Magnetic Thin Films
BT  - Proceedings of the 5th International Conference on Advanced Design and Manufacturing Engineering
PB  - Atlantis Press
SP  - 2076
EP  - 2080
SN  - 2352-5401
UR  - https://doi.org/10.2991/icadme-15.2015.387
DO  - 10.2991/icadme-15.2015.387
ID  - Zuo2015/10
ER  -