Proceedings of the 2015 International conference on Applied Science and Engineering Innovation

An object-oriented and colored timed Petri Net Model for automated Interbay material handling system of semiconductor wafer fab

Authors
Lihui Wu, Dengjie Zhu, Zhaoyun Wu
Corresponding Author
Lihui Wu
Available Online May 2015.
DOI
10.2991/asei-15.2015.164How to use a DOI?
Keywords
Semiconductor, Interbay, Object, Petri net, Model.
Abstract

To analyze the performance of automated Interbay material handling system in semiconductor wafer fabrication system, an Object-oriented and Colored Timed Petri Net (OCTPN) model was presented. The model could describe the practical hardware and operation considerations of Interbay system, such as transportation rail, shortcut, stocker and routing of overhead hoist transporters. To decrease complexity of modeling process, these practical hardware and operation considerations of Interbay system were encapsulated with object class. Therefore, the OCTPN model could be re-configurable and re-usable. With data from an Interbay material handling system of 200 mm semiconductor wafer fab, an illustrative example is built to evaluate the model. The result shows that the proposed OCTPN model is effective.

Copyright
© 2015, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Download article (PDF)

Volume Title
Proceedings of the 2015 International conference on Applied Science and Engineering Innovation
Series
Advances in Engineering Research
Publication Date
May 2015
ISBN
978-94-62520-94-3
ISSN
2352-5401
DOI
10.2991/asei-15.2015.164How to use a DOI?
Copyright
© 2015, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Cite this article

TY  - CONF
AU  - Lihui Wu
AU  - Dengjie Zhu
AU  - Zhaoyun Wu
PY  - 2015/05
DA  - 2015/05
TI  - An object-oriented and colored timed Petri Net Model for automated Interbay material handling system of semiconductor wafer fab
BT  - Proceedings of the 2015 International conference on Applied Science and Engineering Innovation
PB  - Atlantis Press
SP  - 838
EP  - 841
SN  - 2352-5401
UR  - https://doi.org/10.2991/asei-15.2015.164
DO  - 10.2991/asei-15.2015.164
ID  - Wu2015/05
ER  -