Production technology and application of thin film materials in micro fabrication

DOI

10.2991/mmebc-16.2016.243How to use a DOI?

Keywords

thin film, micro manufacturing,

Abstract

This paper introduces the film material in micro manufacturing in general, it is covered in a wafer. Then, it focuses on the production process of the thin film, mainly has the PVD method, which is formed by the physical method; the other is VCD, that is the chemical method to produce the film. Finally, the various uses of micro thin films are introduced.

Copyright

© 2016, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Download article (PDF)

TY  - CONF
AU  - Xiaoming Hu
PY  - 2016/06
DA  - 2016/06
TI  - Production technology and application of thin film materials in micro fabrication
BT  - Proceedings of the 2016 6th International Conference on Machinery, Materials, Environment, Biotechnology and Computer
PB  - Atlantis Press
SP  - 1193
EP  - 1199
SN  - 2352-5401
UR  - https://doi.org/10.2991/mmebc-16.2016.243
DO  - 10.2991/mmebc-16.2016.243
ID  - Hu2016/06
ER  -