Design and Experiment of Precision Flatness Measurement Device for Miniature Parts

DOI

10.2991/mcei-16.2016.255How to use a DOI?

Keywords

Precision measurement; Flexure hinge; Flatness; Miniature parts

Abstract

To achieve stringent evaluation of the flatness error for some miniature parts, a novel flatness measurement device based on the coordinate measurement method is designed. A two-dimensional flexible guide mechanism is used as the flatness measurement datum. The micrometer head drives the flexible guide way to accomplish two-dimensional scanning movement in plane. An inductive measurement head whose measuring force is adjustable is used to measure work piece surface. A sample is measured in the range of 10mm ž 10mm and the flatness error 0.48 m is obtained with the evaluation of the least square method.

Copyright

© 2017, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Yu Zhang
AU  - Hongxi Wang
AU  - Li Feng
AU  - Yaning Li
PY  - 2016/12
DA  - 2016/12
TI  - Design and Experiment of Precision Flatness Measurement Device for Miniature Parts
BT  - Proceedings of the 2016 6th International Conference on Mechatronics, Computer and Education Informationization (MCEI 2016)
PB  - Atlantis Press
SP  - 1245
EP  - 1249
SN  - 1951-6851
UR  - https://doi.org/10.2991/mcei-16.2016.255
DO  - 10.2991/mcei-16.2016.255
ID  - Zhang2016/12
ER  -