Mechanical System Design and Analysis of Three Dimensional Scanning Probe Based on Flexible Parallel Mechanism

DOI

10.2991/mcei-16.2016.252How to use a DOI?

Keywords

Canning probe; Parallel mechanism; Decoupling

Abstract

Mechanical coupling is one of the key factors that cause scanning probe mechanical error. Minimizing or eliminating the mechanical coupling error can Optimize structural design of the probe. A three-dimensional scanning probe is designed with three-brach flexibility parallel mechanism, whose guiding stiffness based on the energy method is derived. Mechanical coupling error is simulated and analyzed with finite element method in the paper. The result shows that three-branch parallel scanning probe reduces the mechanical coupling error to about 20% of the error of serial mechanism probe.

Copyright

© 2017, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Beibei Wu
AU  - Hongxi Wang
AU  - Yaxiao Wang
AU  - Weiwei Li
PY  - 2016/12
DA  - 2016/12
TI  - Mechanical System Design and Analysis of Three Dimensional Scanning Probe Based on Flexible Parallel Mechanism
BT  - Proceedings of the 2016 6th International Conference on Mechatronics, Computer and Education Informationization (MCEI 2016)
PB  - Atlantis Press
SP  - 1225
EP  - 1232
SN  - 1951-6851
UR  - https://doi.org/10.2991/mcei-16.2016.252
DO  - 10.2991/mcei-16.2016.252
ID  - Wu2016/12
ER  -