Measurement of Motion Error of Linear Stage

DOI

10.2991/mcae-16.2016.36How to use a DOI?

Keywords

component; measurement of kinematic errors; laser interferometer; displacement measurement; angle measurement

Abstract

In this paper, we propose measurement system of the six degree of motion errors which is based on distance measurement by the laser interferometer. The system has six parallel laser beams and six corner cube mirrors on the linear stage, which reflect the corresponding laser beams. The error of axial direction is measured with the ordinary distance measurement method by laser interferometer. The vertical errors to the axial direction and the roll errors are measured by tilted beams using the wedge prism. The pitch and yaw errors are measured by the difference between distance of two corner cube mirrors. The experimental layout of the corner cube mirrors and the other optical devices are shown. As a result, the resolution of 66.5 nm for error of the axial direction, the resolution of 383 nm for the vertical errors to the axial direction, the resolution of 1.23 arc-sec for the roll error and the resolution of 0.429 arc-sec for the pitch and yaw errors are obtained in this system.

Copyright

© 2016, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Ryoshu Furutani
AU  - Jun Izawa
AU  - Miyu Ozaki
PY  - 2016/07
DA  - 2016/07
TI  - Measurement of Motion Error of Linear Stage
BT  - Proceedings of the 2016 International Conference on Mechatronics, Control and Automation Engineering
PB  - Atlantis Press
SP  - 151
EP  - 153
SN  - 2352-5401
UR  - https://doi.org/10.2991/mcae-16.2016.36
DO  - 10.2991/mcae-16.2016.36
ID  - Furutani2016/07
ER  -