Research of Processing Errors on Modal Frequency of a Dual-Mass Decoupled Silicon Micro-Gyroscope

DOI

10.2991/jimet-15.2015.80How to use a DOI?

Keywords

silicon micro-gyroscope, processing error, modal frequency, optimization

Abstract

In this paper, the architecture, processing errors analysis and optimization method of a dual-mass silicon micro-gyroscope are presented. The dual-mass silicon micro-gyroscope consists of two identical single mass gyroscopes and a lever mechanism. Driving decoupling springs and sensing decoupling springs are key components to achieve motion decoupling. The processing error analysis indicates that the main influence of processing errors on modal frequency are width error of spring beams. The optimization method which increases the width of spring beams is adopted to reduce the effect of width errors on modal frequency. The structure optimization simulation results demonstrate that the frequency difference variation resulting from the processing errors decreased from 53.45% to 7.08% by increasing the width of spring beams.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Hu Di
AU  - Yang Bo
AU  - Dai Bo
PY  - 2015/12
DA  - 2015/12
TI  - Research of Processing Errors on Modal Frequency of a Dual-Mass Decoupled Silicon Micro-Gyroscope
BT  - Proceedings of the 2015 Joint International Mechanical, Electronic and Information Technology Conference
PB  - Atlantis Press
SP  - 426
EP  - 430
SN  - 2352-538X
UR  - https://doi.org/10.2991/jimet-15.2015.80
DO  - 10.2991/jimet-15.2015.80
ID  - Di2015/12
ER  -