Accuracy Improvement in the Nano-Displacement Measurement Based on the Doppler-Interferometry Method by Cross-talk Reduction

DOI

10.2991/jcis.2006.84How to use a DOI?

Keywords

cross-talk error, Doppler-interferometry, nano-displacement, He-Ne laser

Abstract

In this paper, accuracy improvement in the displacement measurement systems using Doppler-interferometry method is presented. The cross-talk error reduction methods are also discussed. Based on the mentioned method, a new nano-displacement measurement system is designed. In the designed system, the signal to leakage ratio for moving targets in the range of -20m/s to +20m/s is increased to 55dB. The measured phase detection error is equal to 7.9 degree in the normal condition, and after the cross-talk error reduction it is reduced to 0.11 degree. As a result, the displacement measurement error is decreased from 6.9nm to 0.1nm.

Copyright

© 2006, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Saeed Olyaee
AU  - Shahram Mohammad Nejad
PY  - 2006/10
DA  - 2006/10
TI  - Accuracy Improvement in the Nano-Displacement Measurement Based on the Doppler-Interferometry Method by Cross-talk Reduction
BT  - Proceedings of the 9th Joint International Conference on Information Sciences (JCIS-06)
PB  - Atlantis Press
SN  - 1951-6851
UR  - https://doi.org/10.2991/jcis.2006.84
DO  - 10.2991/jcis.2006.84
ID  - Olyaee2006/10
ER  -