A Fuzzy Scheduling System for Dedicated Machine Constraint

DOI

10.2991/jcis.2006.72How to use a DOI?

Keywords

Dedicated Machine Constraint, Fuzzy Scheduling System, Photolithography Machine, Semiconductor manufacturing.

Abstract

In this paper, we propose the Fuzzy Scheduling System (FSS) to deal with the dedicated machine constraint. The constraint of having a dedicated machine for photolithography process is the new issue introduced in photolithography machinery due to natural bias. If we randomly schedule the wafer lots to arbitrary photolithography machines at the first photolithography stage, then the load of all photolithography machines might become unbalanced. It is the main contributor to the complexity and uncertainty of the semiconductor factory. The FSS is to select the best photolithograph machines for each wafer lot at the first, unconstrained, stage to tackle this dedicated machine constraint and to maintain the load balancing among photolithography machines.

Copyright

© 2006, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Arthur M.D. Shr
AU  - Alan Liu
AU  - Yen-Ru Cheng
PY  - 2006/10
DA  - 2006/10
TI  - A Fuzzy Scheduling System for Dedicated Machine Constraint
BT  - Proceedings of the 9th Joint International Conference on Information Sciences (JCIS-06)
PB  - Atlantis Press
SN  - 1951-6851
UR  - https://doi.org/10.2991/jcis.2006.72
DO  - 10.2991/jcis.2006.72
ID  - Shr2006/10
ER  -