Fabrication and characterization of two-dimensional photonic crystal using holographic lithography technology

DOI

10.2991/jcis.2006.311How to use a DOI?

Keywords

photonic crystal, holographic lithography

Abstract

We propose and demonstrate a holographic system using three beams to generate periodic patterns for fabricating photonic crystals. By properly adjusting the incident angle and intensity of three laser beams, the period and structure of interference pattern can be modified. Computer simulation results will be presented and optical holographic system will be constructed. In addition, a simple optical inspection method for real-time examining the structure of photonic crystal will be developed. Optical experimental result will be demonstrated and discussed in this paper.

Copyright

© 2006, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Kuo-Chang Lo
AU  - Mei-Li Hsieh
AU  - Yi-Sheng Lan
PY  - 2006/10
DA  - 2006/10
TI  - Fabrication and characterization of two-dimensional photonic crystal using holographic lithography technology
BT  - Proceedings of the 9th Joint International Conference on Information Sciences (JCIS-06)
PB  - Atlantis Press
SN  - 1951-6851
UR  - https://doi.org/10.2991/jcis.2006.311
DO  - 10.2991/jcis.2006.311
ID  - Lo2006/10
ER  -