Dynamic Simulation Analysis of Off-axis Sensitivity in a Laterally-driven MEMS Inertia Switch

DOI

10.2991/isaeece-16.2016.19How to use a DOI?

Keywords

MEMS, inertial micro-switch, off-axis sensitivity, contact enhancement

Abstract

A laterally-driven MEMS inertia switch was designed, and its off-axis sensitivity was analyzed and evaluated. The dynamic response process was simulated by ANSYS finite-element model, which indicated that in the designed inertia micro-switch, the distribution of serpentine spring symmetry, the proof mass weight and the whole system stiffness have significant effect on the off-axis sensitivity.

Copyright

© 2016, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Qihuan Zhang
AU  - Zhuoqing Yang
AU  - Guifu Ding
PY  - 2016/04
DA  - 2016/04
TI  - Dynamic Simulation Analysis of Off-axis Sensitivity in a Laterally-driven MEMS Inertia Switch
BT  - Proceedings of the 2016 International Symposium on Advances in Electrical, Electronics and Computer Engineering
PB  - Atlantis Press
SP  - 91
EP  - 94
SN  - 2352-5401
UR  - https://doi.org/10.2991/isaeece-16.2016.19
DO  - 10.2991/isaeece-16.2016.19
ID  - Zhang2016/04
ER  -