Study on a Novel Capacitive Pressure Sensor with Large Dynamic Range

DOI

10.2991/iiicec-15.2015.90How to use a DOI?

Keywords

capacitive pressure sensor; circular flat diaphragm; large dynamic range

Abstract

In this paper, a novel capacitive pressure sensor with large dynamic range is presented. The working principle and the design structure of the sensor are demonstrated in the paper, then the theoretical calculation of mechanical properties, capacitance and the simulate results are performed. The study shows that the sensitivity of this capacitive pressure transducers is about 0.094f F/h Pa over the range of 20 ~ 100k Pa. The advantage of the structure is that it has a large dynamic range, higher tolerance against the environment than others and the measure flexible according to the demand.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Tongtong Zhang
AU  - Zhengyuan Zhang
PY  - 2015/03
DA  - 2015/03
TI  - Study on a Novel Capacitive Pressure Sensor with Large Dynamic Range
BT  - Proceedings of the 2015 International Industrial Informatics and Computer Engineering Conference
PB  - Atlantis Press
SP  - 396
EP  - 399
SN  - 2352-538X
UR  - https://doi.org/10.2991/iiicec-15.2015.90
DO  - 10.2991/iiicec-15.2015.90
ID  - Zhang2015/03
ER  -