Design of PZT Power Supply for Micro-nano Positioning Platform Based on DSP

DOI

10.2991/icsmim-15.2016.5How to use a DOI?

Keywords

Micro-nano positioning platform; PZT; DSP; PZT power supply

Abstract

PZT is the key actuator to high precision micro-nano positioning platform. Based on high large space density precision micro-nano positioning platform, we use DSP and four roads 16-bit DAC, high order low pass filter, the voltage amplifier circuit, power amplifier circuit, high voltage stabilizing circuit and phase compensating circuit to design PZT power supply. And also we use Multisim12 to simulate it. Through the simulation and experimental validation, the PZT power supply has continuous adjustable dc voltage 0-150 V, and the ripple is under 8mV. Then it has fast dynamic response, good stability, strongly driving ability and so on. So the PZT power supply can completely satisfy the micro-nano positioning platform.

Copyright

© 2016, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Lina Hao
AU  - Xinchao Zhang
AU  - Ruimin Cao
PY  - 2016/01
DA  - 2016/01
TI  - Design of PZT Power Supply for Micro-nano Positioning Platform Based on DSP
BT  - Proceedings of the 2015 4th International Conference on Sensors, Measurement and Intelligent Materials
PB  - Atlantis Press
SP  - 20
EP  - 25
SN  - 2352-538X
UR  - https://doi.org/10.2991/icsmim-15.2016.5
DO  - 10.2991/icsmim-15.2016.5
ID  - Hao2016/01
ER  -