Photonic crystal fiber micro pressure sensor based on an extrinsic Fabry-Perot interferometer fabricated by femtosecond laser
Authors
Peng Wang, Liuchao Zhang, Feifei Chen, Zhitao Cao
Corresponding Author
Peng Wang
Available Online April 2017.
- DOI
- 10.2991/icmse-17.2017.84How to use a DOI?
- Keywords
- Fabry-Perot; Fiber optics sensors; Microstructure fabrication; Pressure measurement
- Abstract
A photonic crystal fiber extrinsic Fabry-Perot interferometric (FPI) micro pressure sensor is fabricated by femtosecond laser (fs) and fusion splicing. The pressure sensitivity can be adjusted by controlling the thickness of the diaphragm. The laser mircomachined FPI cavity helps to reduce the temperature-pressure cross-sensitivity. A pressure sensitivity of 282nm/MPa in terms of cavity length change is demonstrated within 1MPa.
- Copyright
- © 2017, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Peng Wang AU - Liuchao Zhang AU - Feifei Chen AU - Zhitao Cao PY - 2017/04 DA - 2017/04 TI - Photonic crystal fiber micro pressure sensor based on an extrinsic Fabry-Perot interferometer fabricated by femtosecond laser BT - Proceedings of the 2017 7th International Conference on Manufacturing Science and Engineering (ICMSE 2017) PB - Atlantis Press SP - 445 EP - 450 SN - 2352-5401 UR - https://doi.org/10.2991/icmse-17.2017.84 DO - 10.2991/icmse-17.2017.84 ID - Wang2017/04 ER -