Proceedings of the 2017 7th International Conference on Manufacturing Science and Engineering (ICMSE 2017)

Photonic crystal fiber micro pressure sensor based on an extrinsic Fabry-Perot interferometer fabricated by femtosecond laser

Authors
Peng Wang, Liuchao Zhang, Feifei Chen, Zhitao Cao
Corresponding Author
Peng Wang
Available Online April 2017.
DOI
10.2991/icmse-17.2017.84How to use a DOI?
Keywords
Fabry-Perot; Fiber optics sensors; Microstructure fabrication; Pressure measurement
Abstract

A photonic crystal fiber extrinsic Fabry-Perot interferometric (FPI) micro pressure sensor is fabricated by femtosecond laser (fs) and fusion splicing. The pressure sensitivity can be adjusted by controlling the thickness of the diaphragm. The laser mircomachined FPI cavity helps to reduce the temperature-pressure cross-sensitivity. A pressure sensitivity of 282nm/MPa in terms of cavity length change is demonstrated within 1MPa.

Copyright
© 2017, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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Volume Title
Proceedings of the 2017 7th International Conference on Manufacturing Science and Engineering (ICMSE 2017)
Series
Advances in Engineering Research
Publication Date
April 2017
ISBN
978-94-6252-327-2
ISSN
2352-5401
DOI
10.2991/icmse-17.2017.84How to use a DOI?
Copyright
© 2017, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Cite this article

TY  - CONF
AU  - Peng Wang
AU  - Liuchao Zhang
AU  - Feifei Chen
AU  - Zhitao Cao
PY  - 2017/04
DA  - 2017/04
TI  - Photonic crystal fiber micro pressure sensor based on an extrinsic Fabry-Perot interferometer fabricated by femtosecond laser
BT  - Proceedings of the 2017 7th International Conference on Manufacturing Science and Engineering (ICMSE 2017)
PB  - Atlantis Press
SP  - 445
EP  - 450
SN  - 2352-5401
UR  - https://doi.org/10.2991/icmse-17.2017.84
DO  - 10.2991/icmse-17.2017.84
ID  - Wang2017/04
ER  -