Research on Metal Nanostructure Building Based on Nanoimprint Lithography

DOI

10.2991/icmmct-17.2017.244How to use a DOI?

Keywords

metal nanostructure, structure building, nanoimprint lithography

Abstract

We use the nanoimprint lithography to construct nanostructure on the surface of double metal Au electrode. Through the analysis of the influence of different processing parameters on the machining dimensions, we can arbitrarily control the structure size of the nano-pattern. By natural oxidation in air and selection of the appropriate parameters, the nanostructured metals are obtained. More importantly, we have successfully fabricated the inverse structure of the gold nano hemisphere array on the flexible substrate.

Copyright

© 2017, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Minqi Yin
AU  - Hongwen Sun
PY  - 2017/04
DA  - 2017/04
TI  - Research on Metal Nanostructure Building Based on Nanoimprint Lithography
BT  - Proceedings of the 2017 5th International Conference on Machinery, Materials and Computing Technology (ICMMCT 2017)
PB  - Atlantis Press
SP  - 1252
EP  - 1256
SN  - 2352-5401
UR  - https://doi.org/10.2991/icmmct-17.2017.244
DO  - 10.2991/icmmct-17.2017.244
ID  - Yin2017/04
ER  -