Research of Image Detection Method by Computer Vision for Photon Devices Circuit Measurement

DOI

10.2991/icmmct-16.2016.373How to use a DOI?

Keywords

Photon device line; Image Detection; Line-width; Radius of curvature

Abstract

Considering the low efficiency of manual detection method in photon devices fault checking, a new detecting method by image processing for photon device is proposed in this paper ,through the new method, photon device images are captured by camera which is installed on microscope, filtering ,mosaic, segmentation of images and curvature radius measurement are done by computer, finally, complete circuit diagram of photon devices and the necessary parameter values such as radius of curvature are got. Experiments show that the test results error is ±0.03um,the method can improve production efficiency, shorten the production period and reduce production cost.

Copyright

© 2016, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Yaqi Fu
AU  - Jiandong Shi
AU  - Yaohua Deng
AU  - Liming Wu
PY  - 2016/03
DA  - 2016/03
TI  - Research of Image Detection Method by Computer Vision for Photon Devices Circuit Measurement
BT  - Proceedings of the 2016 4th International Conference on Machinery, Materials and Computing Technology
PB  - Atlantis Press
SP  - 1875
EP  - 1878
SN  - 2352-5401
UR  - https://doi.org/10.2991/icmmct-16.2016.373
DO  - 10.2991/icmmct-16.2016.373
ID  - Fu2016/03
ER  -