A High Performance ASIC Interface for MEMS Gyroscope

DOI

10.2991/iceep-18.2018.316How to use a DOI?

Keywords

Sigma-delta; Driving Closed-Loop; Filter chain; Switch-capacitance

Abstract

This paper presents the ASIC design and implementation for micro-machined gyroscope, The ASIC interface is including an analog ASIC and a digital ASIC, and can afford driving closed-loop, On-chip reference generation, CIC and IIR filter chain, High performance MEMS gyroscope output detection. The two ASICs are implemented in 0.18µm HVCMOS technology operates with a single 5V supply. The ASIC employ a 4th-order CRFF architecture for achieving high SNR performance. The sampling frequency of the SDM is 2 MHz. And filter chain (including CIC and IIR)with the mechanical sensor element to reject the excessive in-band quantization noise and the resonance signal in the sense of the Gyroscope. The C/V conversion is implemented with continuous capacitance detection , and 4th-order sigma-delta modulator is implemented with switched-capacitor techniques, The gyroscope`s resonance frequency is locked by PLL, and constant drive amplitude in a closed loop system.

Copyright

© 2018, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Bing Meng
AU  - Lin Liu
AU  - Gang Wang
AU  - Hangwei Lv
PY  - 2018/09
DA  - 2018/09
TI  - A High Performance ASIC Interface for MEMS Gyroscope
BT  - Proceedings of the 2018 7th International Conference on Energy and Environmental Protection (ICEEP 2018)
PB  - Atlantis Press
SP  - 1736
EP  - 1743
SN  - 2352-5401
UR  - https://doi.org/10.2991/iceep-18.2018.316
DO  - 10.2991/iceep-18.2018.316
ID  - Meng2018/09
ER  -