Study on Crystalline Volume Fraction and Activation Energy for Silicon Thin Film Prepared by VHF-PECVD

DOI

10.2991/iceep-17.2017.128How to use a DOI?

Keywords

VHF-PECVD; microcrystalline silicon; activation energy; crystalline volume fraction

Abstract

Intrinsic microcrystalline silicon thin film were prepared by VHF-PECVD, the activation energy of thin film were measured by activation energy testing equipment. The activation energy of samples with different crystalline volume fraction were studied. The results showed that: the activation energy of samples deposited at amorphous/microcrystalline transition zone decreases crystalline volume fraction increasing.

Copyright

© 2017, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Qingdong Chen
AU  - Junping Wang
PY  - 2017/06
DA  - 2017/06
TI  - Study on Crystalline Volume Fraction and Activation Energy for Silicon Thin Film Prepared by VHF-PECVD
BT  - Proceedings of the 2017 6th International Conference on Energy and Environmental Protection (ICEEP 2017)
PB  - Atlantis Press
SP  - 725
EP  - 729
SN  - 2352-5401
UR  - https://doi.org/10.2991/iceep-17.2017.128
DO  - 10.2991/iceep-17.2017.128
ID  - Chen2017/06
ER  -