The Ambi-room electric auto-control system of final Optics Assembly

DOI

10.2991/icecee-15.2015.108How to use a DOI?

Keywords

Ambi-room; Final Optics Assembly; Purge Air Sweeping; Target Chamber; integrated optics module (IOM)

Abstract

This control system adopts Siemens S7-400 PLC to realize these functions of monitoring ambi-room pressure by the vacuum gauges and manipulating all vacuum valves in real time etc. The ambi-room control system belonged to unworthy man guard equipments has severe control request of "absolute safety", so that it must ensure safety and credibility in every operation flow: vacuum achievement, input dry clean air, keeping ambi-room pressure, dynamic state purge air sweeping etc. So safety design and manufacture is preferential to any other request, furthermore this idea passes through all control workflow. Because the user mutual interface is very friendly, the manipulation is simple and easy to learn for all assigned operators.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Liquan Wang
AU  - Yukun Jing
AU  - Bing Feng
AU  - Yong Xiang
AU  - Zhongpen Gao
PY  - 2015/06
DA  - 2015/06
TI  - The Ambi-room electric auto-control system of final Optics Assembly
BT  - Proceedings of the 2015 International Conference on Electrical, Computer Engineering and Electronics
PB  - Atlantis Press
SP  - 523
EP  - 526
SN  - 2352-538X
UR  - https://doi.org/10.2991/icecee-15.2015.108
DO  - 10.2991/icecee-15.2015.108
ID  - Wang2015/06
ER  -