The Influence of Electrode Geometry on Mass Sensitivity of Quartz Crystal Microbalance

DOI

10.2991/icecee-15.2015.61How to use a DOI?

Keywords

Quartz crystal microbalance; mass sensitivity; electrode.

Abstract

The mass sensitivity of the quartz crystal microbalance is analytically calculated for various configuration and various thickness of electrode. The data indicated that both the configuration and the thickness of electrode are influence the mass sensitivity. For the conventional electrode structure, when the thickness of electrode increase from 400A to 1000A.the maxim mass sensitivity which pointed at center of electrode are increase from 0.78×1013Hz/Kg to 2.41×1013Hz/Kg and the mass sensitivity increased at same point of radius with the increase of thickness of electrode. With the decrease of the thickness of electrode, the mass sensitivity become more uniform. Analysis also show that the triple-ring electrode structure has the highest mass sensitivity compare with the ring and circle.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Li Yang
AU  - Xianhe Huang
PY  - 2015/06
DA  - 2015/06
TI  - The Influence of Electrode Geometry on Mass Sensitivity of Quartz Crystal Microbalance
BT  - Proceedings of the 2015 International Conference on Electrical, Computer Engineering and Electronics
PB  - Atlantis Press
SP  - 286
EP  - 290
SN  - 2352-538X
UR  - https://doi.org/10.2991/icecee-15.2015.61
DO  - 10.2991/icecee-15.2015.61
ID  - Yang2015/06
ER  -