Finite Element Analysis Of thin Quartz Wafer Stress Distribution In The Radial Force

DOI

10.2991/iccet-15.2015.310How to use a DOI?

Keywords

radial force; thin circular quartz crystal; stress distribution; finite element analysis

Abstract

Extending the stress distribution result in semi-infinite anisotropic media slice with centralized force to thin circular quartz crystal resonator, the relationship of frequency relative variation and adding force azimuth and adding force strength of the resonator with radial centralized force was obtained, and the result of comparing with the relative frequency variation of the resonator with electrodes on its geometric center was also gained. At the same time, using the finite element method analyzed the stress variation in the different positions on the thin circular quartz crystal slice with radial force, and deposited electrode in the correspond position to form resonator, it’s force-sensitive character in different positions was tested. The result shows, the theoretical calculations and analysis was consistent with the experimental result.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Wenjie Tian
AU  - Qinjiang Zhao
AU  - Sanming Feng
AU  - Bo Ma
PY  - 2015/11
DA  - 2015/11
TI  - Finite Element Analysis Of thin Quartz Wafer Stress Distribution In The Radial Force
BT  - Proceedings of the 5th International Conference on Civil Engineering and Transportation 2015
PB  - Atlantis Press
SP  - 1662
EP  - 1668
SN  - 2352-5401
UR  - https://doi.org/10.2991/iccet-15.2015.310
DO  - 10.2991/iccet-15.2015.310
ID  - Tian2015/11
ER  -