Chemical Machining of Monel

DOI

10.2991/iccasp-16.2017.20How to use a DOI?

Keywords

Chemical machining, depth of etch, undercut, Monel 400

Abstract

This study shows the effect of etching condition on microchannel of 100 µm width. Microchannels were fabricated on Monel 400 substrate by using different concentration of Ferric chloride (FeCl3) and nitric acid (HNO3) in water. Effect of exposure time on channel width and peel off resistance of photoresist is also studied. It is found that etching temperature has significant effect on undercut and depth of etch.

Copyright

© 2017, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Deepakkumar Patil
AU  - Rupesh Dugad
AU  - Sachin Farakate
AU  - Mudigonda Sadaiah
PY  - 2016/12
DA  - 2016/12
TI  - Chemical Machining of Monel
BT  - Proceedings of the International Conference on Communication and Signal Processing 2016 (ICCASP 2016)
PB  - Atlantis Press
SP  - 121
EP  - 126
SN  - 1951-6851
UR  - https://doi.org/10.2991/iccasp-16.2017.20
DO  - 10.2991/iccasp-16.2017.20
ID  - Patil2016/12
ER  -