Micro Mechanical Force Sensor Application Situation and Expectation Analysis

DOI

10.2991/iccasm.2012.173How to use a DOI?

Keywords

Micro mechanical force, sensors, summarize

Abstract

Sensor’s microminiaturization is one of the important developing direction of the sensing technology. Micro mechanical processing technology is based technology of micro silicon sensor, and is also used to make micro actuators and microelectromechanical system technology, The appearance of micro mechanical processing technology puts forward sensor, especially force sensor, to a new development stage. This article will give a brief analysis focusing on some of the micro mechanical force sensor application situation and application prospects.

Copyright

© 2012, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Download article (PDF)

TY  - CONF
AU  - Hao Ding
AU  - Jin Zhu
AU  - Yuping Qin
AU  - Shuang Zhang
PY  - 2012/08
DA  - 2012/08
TI  - Micro Mechanical Force Sensor Application Situation and Expectation Analysis
BT  - Proceedings of the 2012 International Conference on Computer Application and System Modeling (ICCASM 2012)
PB  - Atlantis Press
SP  - 681
EP  - 684
SN  - 1951-6851
UR  - https://doi.org/10.2991/iccasm.2012.173
DO  - 10.2991/iccasm.2012.173
ID  - Ding2012/08
ER  -