Simulation of 3-dimensional Morphology on Different Substrates of Thin Film Growth

DOI

10.2991/iccasm.2012.67How to use a DOI?

Keywords

film growth, substrate, exchange, monte carlo simulation, roughness

Abstract

A kinetic Monte Carlo model describing the three-dimensional thin film growth on different substrate s is presented in which the diffusion of adatoms on substrate and between various layers as well as the exchange process between diffusing adatioms and the underneath surfactant atoms are taken into account. The influences of the ES barrier, the shape of substrate and the surfactant-covered substrate on the growth mode and morphology during the multi-layer film growth are studied. The relationship between surface roughness and the coverage are considered in different substrate conditions.

Copyright

© 2012, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Lili Wu
AU  - Junying Zhang
PY  - 2012/08
DA  - 2012/08
TI  - Simulation of 3-dimensional Morphology on Different Substrates of Thin Film Growth
BT  - Proceedings of the 2012 International Conference on Computer Application and System Modeling (ICCASM 2012)
PB  - Atlantis Press
SP  - 269
EP  - 271
SN  - 1951-6851
UR  - https://doi.org/10.2991/iccasm.2012.67
DO  - 10.2991/iccasm.2012.67
ID  - Wu2012/08
ER  -