C-axis Oriented ZnO Piezoelectric Thin Films Prepared by RF Magnetron Sputtering for Saw Filters

DOI

10.2991/iccasm.2012.54How to use a DOI?

Keywords

ZnO films, SAW, lift-off, IDT

Abstract

Well-crystallized ZnO thin film with high (002) orientation was prepared by RF magnetron sputtering on Pt/Ti/SiO2/Si substrates. Interdigital transducer (IDT) electrode with 40 m wavelength was fabricated by lift-off method based on photolithograph techniques. The thickness of the Al electrode was about 200nm. The orientation of the film was studied using X-ray diffraction. The surface morphology was investigated using scanning electron microscopy (SEM). SAW filter was measured by Network Analyzer. To improving the quality of ZnO film and the property of SAW filter, Mn-doped ZnO films were deposited and the structural and electrical properties of the films han been characterized.

Copyright

© 2012, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Weihua Huang
PY  - 2012/08
DA  - 2012/08
TI  - C-axis Oriented ZnO Piezoelectric Thin Films Prepared by RF Magnetron Sputtering for Saw Filters
BT  - Proceedings of the 2012 International Conference on Computer Application and System Modeling (ICCASM 2012)
PB  - Atlantis Press
SP  - 217
EP  - 220
SN  - 1951-6851
UR  - https://doi.org/10.2991/iccasm.2012.54
DO  - 10.2991/iccasm.2012.54
ID  - Huang2012/08
ER  -