Proceedings of the 2012 International Conference on Computer Application and System Modeling (ICCASM 2012)

C-axis Oriented ZnO Piezoelectric Thin Films Prepared by RF Magnetron Sputtering for Saw Filters

Authors
Weihua Huang
Corresponding Author
Weihua Huang
Available Online August 2012.
DOI
10.2991/iccasm.2012.54How to use a DOI?
Keywords
ZnO films, SAW, lift-off, IDT
Abstract

Well-crystallized ZnO thin film with high (002) orientation was prepared by RF magnetron sputtering on Pt/Ti/SiO2/Si substrates. Interdigital transducer (IDT) electrode with 40 m wavelength was fabricated by lift-off method based on photolithograph techniques. The thickness of the Al electrode was about 200nm. The orientation of the film was studied using X-ray diffraction. The surface morphology was investigated using scanning electron microscopy (SEM). SAW filter was measured by Network Analyzer. To improving the quality of ZnO film and the property of SAW filter, Mn-doped ZnO films were deposited and the structural and electrical properties of the films han been characterized.

Copyright
© 2012, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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Volume Title
Proceedings of the 2012 International Conference on Computer Application and System Modeling (ICCASM 2012)
Series
Advances in Intelligent Systems Research
Publication Date
August 2012
ISBN
978-94-91216-00-8
ISSN
1951-6851
DOI
10.2991/iccasm.2012.54How to use a DOI?
Copyright
© 2012, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Cite this article

TY  - CONF
AU  - Weihua Huang
PY  - 2012/08
DA  - 2012/08
TI  - C-axis Oriented ZnO Piezoelectric Thin Films Prepared by RF Magnetron Sputtering for Saw Filters
BT  - Proceedings of the 2012 International Conference on Computer Application and System Modeling (ICCASM 2012)
PB  - Atlantis Press
SP  - 217
EP  - 220
SN  - 1951-6851
UR  - https://doi.org/10.2991/iccasm.2012.54
DO  - 10.2991/iccasm.2012.54
ID  - Huang2012/08
ER  -