Development and Performance Evaluation of Fine Stage for 3-DOF Error Compensation

DOI

10.2991/icaita-16.2016.27How to use a DOI?

Keywords

form accuracy; fine stage; parallel mechanism; error compensation

Abstract

In this paper, a fine stage based on parallel mechanism was developed for 3-DOF error compensation to improve the form accuracy of the workpiece. This mechanism with 3-DOF motions in the plane was designed as the parallel structure for minimization and high structural stiffness. The static and dynamic stiffness analysis of the developed flexure-based mechanism have been conducted to verify the validity in displacement of workspace in the X- and Y- directions. For accurate positioning, the effect by Abbe’s offset between the measuring and driving coordinate system was analyzed and minimized. The displacement of piezoelectric actuators was determined from the measured data and inverse kinematic. The performance of the developed fine stage was evaluated through the basic performance evaluation.

Copyright

© 2016, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Jae-Chang Lee
AU  - Min-Jae Lee
AU  - Hoon-Hee Lee
AU  - Seung-Han Yang
PY  - 2016/01
DA  - 2016/01
TI  - Development and Performance Evaluation of Fine Stage for 3-DOF Error Compensation
BT  - Proceedings of the 2016 International Conference on Artificial Intelligence: Technologies and Applications
PB  - Atlantis Press
SP  - 108
EP  - 111
SN  - 1951-6851
UR  - https://doi.org/10.2991/icaita-16.2016.27
DO  - 10.2991/icaita-16.2016.27
ID  - Lee2016/01
ER  -