High Temperature SAW wireless sensors based on YCOB and Langasite

DOI

10.2991/icadme-16.2016.138How to use a DOI?

Keywords

SAW wireless sensor, high temperature, langasite, yttrium calcium oxoborate

Abstract

High temperature SAW resonators were fabricated on YCa4O(BO3)3 substrates with cutting type of X-90° and Z-90° and langasite substrates with Euler angle of (0°, 138.5°, 117°) and (0°, 138.5°, 27°). The temperature characteristics of these resonators have been studied in this paper. The results show that resonators on all four substrates have high temperature stability up to 600 °C. The resonance frequency of the SAW resonators based on YCa4O(BO3)3 substrates decrease more linearly with temperature than those on langasite substrates. The temperature sensitivity of SAW resonator with Z-90° YCOB substrates and X-90° YCOB substrates are 21.22 kHz/°C and 13.44 kHz/°C, respectively. It suggests that YCa4O(BO3)3 with cutting type of Z-90° is suitable candidate for piezoelectric substrate used for sensors working in high temperature environment.

Copyright

© 2016, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Bin Peng
AU  - Yilin Cui
AU  - Lin Shu
AU  - Yihong Zeng
AU  - Wanli Zhang
PY  - 2017/07
DA  - 2017/07
TI  - High Temperature SAW wireless sensors based on YCOB and Langasite
BT  - Proceedings of the 2016 6th International Conference on Advanced Design and Manufacturing Engineering (ICADME 2017)
PB  - Atlantis Press
SP  - 772
EP  - 775
SN  - 2352-5401
UR  - https://doi.org/10.2991/icadme-16.2016.138
DO  - 10.2991/icadme-16.2016.138
ID  - Peng2017/07
ER  -