Development of Pressure Sensor for Oil and Gas Field Based on Sputtered Thin Film

DOI

10.2991/icadme-15.2015.354How to use a DOI?

Keywords

oil and gas field; pressure sensor; sputtered thin film

Abstract

Gas well head pressure sensors are the important front-end equipments of digitalization construction of Changqing oil field. Foreign pressure sensors are once relied on for a long time there. A problem urgent to be solved of digitalization construction is to develope pressure sensors with independent intellectual property and with integrated advantages of high precision, high stability, high reliability and wide temperature range. This paper introduced the development of a kind of pressure sensor based on technology of sputtered thin film and method of micro-machining. Design and manufacture of the pressure-sensitive element are introduced, which are comprised of elastic body, insulating film, wire grid etc. Meanwhile, tests and experiments are developed. The pressure sensors this paper developed possess the merits of high precision, high stability, and could meet the long term pressure testing requirements of oil and gas field.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Yong Chen
AU  - Shuangquan Liu
AU  - Xiaohong Bai
PY  - 2015/10
DA  - 2015/10
TI  - Development of Pressure Sensor for Oil and Gas Field Based on Sputtered Thin Film
BT  - Proceedings of the 5th International Conference on Advanced Design and Manufacturing Engineering
PB  - Atlantis Press
SP  - 1917
EP  - 1921
SN  - 2352-5401
UR  - https://doi.org/10.2991/icadme-15.2015.354
DO  - 10.2991/icadme-15.2015.354
ID  - Chen2015/10
ER  -