New Structure and Physical Characteristics of Intelligent Real-time Control on Optical Coating

DOI

10.2991/icacsei.2013.113How to use a DOI?

Keywords

Intelligent Control, Optical Detection, Thin-film, Four-light Beams, Precision.

Abstract

Comparing general optical thin-film deposition systems, which present poor precision and automation level on monitoring film thickness, we proposed a new intelligent photoelectric-control-analysis coating system. The structure of the new system includes a four-light path photoelectric system matching with double-frequency modulation hardware equipment and a compound filteration-control system. The compound filteration-control system contains anti-disturbance circuit, analog circuits of multi-stage amplifier, symmetrical dual-lock-phase amplifier, digital division, anti-pulse-disturbance digital filter, linearization of digital display, algorithm of picking off singular data, and extremum-judgment algorithm. Experiments show that all functions of intelligent real-time monitoring film thickness are achieved. The physical characteristics, for example, the static and dynamic stabilities and the control thin-film thickness precision, are extremely increased. The resolution of digital display as per reflectivity is 0.02%. The duplication, i.e., standard deviation of monitoring thin-film thickness, is less than 0.50%. The S/N approaches to 1500. The linearity of drift is very high, and the static drift ratio is close to 1.63%/h. In conclusion the new system has advantages of the high control precision for thin-film thickness and the favorable static and dynamic stabilities.

Copyright

© 2013, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Shi jun Xu
AU  - Xiao ling Ren
AU  - Chun min Zhang
PY  - 2013/08
DA  - 2013/08
TI  - New Structure and Physical Characteristics of Intelligent Real-time Control on Optical Coating
BT  - Proceedings of the 2013 International Conference on Advanced Computer Science and Electronics Information (ICACSEI 2013)
PB  - Atlantis Press
SP  - 456
EP  - 460
SN  - 1951-6851
UR  - https://doi.org/10.2991/icacsei.2013.113
DO  - 10.2991/icacsei.2013.113
ID  - Xu2013/08
ER  -