Design of air Atmospheric Pressure Diffuse Coplanar Barrier Discharge apparatus

DOI

10.2991/emeit.2012.225How to use a DOI?

Keywords

Coplanar barrier discharge, Material modification, Dielectric barrier discharge

Abstract

In this study, we explored a coplanar barrier discharge apparatus for material modification. The apparatus is introduced and several ways are proposed for fabricating the apparatus. The parameters are optimized and proposed experimentally. The results show the electrode distance and the dielectric layer thickness are very important for the discharge performance. When the electrode distance is 0.5 mm, the dielectric layer thickness is 25 m, the coplanar barrier discharge plasma appears on the device in air at 760 torr.

Copyright

© 2012, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Kun WANG
AU  - Jian LI
AU  - Shi-qing WANG
PY  - 2012/09
DA  - 2012/09
TI  - Design of air Atmospheric Pressure Diffuse Coplanar Barrier Discharge apparatus
BT  - Proceedings of the 2nd International Conference on Electronic & Mechanical Engineering and Information Technology (EMEIT 2012)
PB  - Atlantis Press
SP  - 1034
EP  - 1037
SN  - 1951-6851
UR  - https://doi.org/10.2991/emeit.2012.225
DO  - 10.2991/emeit.2012.225
ID  - WANG2012/09
ER  -