Study of the Method to Capture the Loose Particles inside the Device Cavity

DOI

10.2991/eame-17.2017.49How to use a DOI?

Keywords

particles; particle impact noise detection (PIND); radiography; scanning electron microscope (SEM)

Abstract

The paper introduced the method to capture the particles inside the devices cavity in detail. The method included several steps, which were as follows: particles detection, grinding cover plate, cleaning cover plate, holing cover plate, capturing particles and particles analysis. The particles would be controlled effectively only

Copyright

© 2017, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Xuan Pei
AU  - Shanbin Xi
AU  - Zhaofeng Gao
AU  - Kui Zhang
PY  - 2017/04
DA  - 2017/04
TI  - Study of the Method to Capture the Loose Particles inside the Device Cavity
BT  - Proceedings of the 2017 2nd International Conference on Electrical, Automation and Mechanical Engineering (EAME 2017)
PB  - Atlantis Press
SP  - 203
EP  - 206
SN  - 2352-5401
UR  - https://doi.org/10.2991/eame-17.2017.49
DO  - 10.2991/eame-17.2017.49
ID  - Pei2017/04
ER  -