Vacuum Pump System Diagnosis with the Pumping Speed Indicator

DOI

10.2991/eame-15.2015.140How to use a DOI?

Keywords

vacuum pump system; system diagnosis; pumping speed indicator

Abstract

The diagnosis of a vacuum pump system for the semiconductor manufacturing is directly related to the failure rate of wafer. Pumping speed is the volume flow rate per unit time by the vacuum pump and represents the performance of vacuum pump directly. Unfortunately, it is impossible to measure the pumping speed in situation. We proposed an alternative method to infer pumping speed indirectly in situ. The Pumping speed indicator (PSI) is based on similarity of the pump-down method and the semiconductor manufacturing processes, estimates the exhaust capacity of vacuum pump.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - K. Lee
AU  - G.H. Kim
PY  - 2015/07
DA  - 2015/07
TI  - Vacuum Pump System Diagnosis with the Pumping Speed Indicator
BT  - Proceedings of the 2015 International Conference on Electrical, Automation and Mechanical Engineering
PB  - Atlantis Press
SP  - 492
EP  - 495
SN  - 2352-5401
UR  - https://doi.org/10.2991/eame-15.2015.140
DO  - 10.2991/eame-15.2015.140
ID  - Lee2015/07
ER  -