Proceedings of the 2015 International Conference on Electrical, Automation and Mechanical Engineering

Measurement of Capacitive Accelerometer with Decreased Nonlinearity of Static Characteristic

Authors
S. Timoshenkov, V. Kalugin, A. Shalimov, A. Timoshenkov, M. Golovinskiy, S. Berezueva
Corresponding Author
S. Timoshenkov
Available Online July 2015.
DOI
10.2991/eame-15.2015.126How to use a DOI?
Keywords
MEMS accelerometer; capacitive accelerometer; capacitance-to-voltage converter
Abstract

A series of the experimental works, which allowed achieving an evident improvement of functional parameters of MEMS accelerometers, was performed by specialists of the Microelectronics Department MIET. In particular – decrease the nonlinearity of the static characteristic. This article describes methods, which allowed achieving these results.

Copyright
© 2015, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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Volume Title
Proceedings of the 2015 International Conference on Electrical, Automation and Mechanical Engineering
Series
Advances in Engineering Research
Publication Date
July 2015
ISBN
978-94-62520-71-4
ISSN
2352-5401
DOI
10.2991/eame-15.2015.126How to use a DOI?
Copyright
© 2015, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Cite this article

TY  - CONF
AU  - S. Timoshenkov
AU  - V. Kalugin
AU  - A. Shalimov
AU  - A. Timoshenkov
AU  - M. Golovinskiy
AU  - S. Berezueva
PY  - 2015/07
DA  - 2015/07
TI  - Measurement of Capacitive Accelerometer with Decreased Nonlinearity of Static Characteristic
BT  - Proceedings of the 2015 International Conference on Electrical, Automation and Mechanical Engineering
PB  - Atlantis Press
SP  - 445
EP  - 447
SN  - 2352-5401
UR  - https://doi.org/10.2991/eame-15.2015.126
DO  - 10.2991/eame-15.2015.126
ID  - Timoshenkov2015/07
ER  -