Measurement of Capacitive Accelerometer with Decreased Nonlinearity of Static Characteristic
Authors
S. Timoshenkov, V. Kalugin, A. Shalimov, A. Timoshenkov, M. Golovinskiy, S. Berezueva
Corresponding Author
S. Timoshenkov
Available Online July 2015.
- DOI
- 10.2991/eame-15.2015.126How to use a DOI?
- Keywords
- MEMS accelerometer; capacitive accelerometer; capacitance-to-voltage converter
- Abstract
A series of the experimental works, which allowed achieving an evident improvement of functional parameters of MEMS accelerometers, was performed by specialists of the Microelectronics Department MIET. In particular – decrease the nonlinearity of the static characteristic. This article describes methods, which allowed achieving these results.
- Copyright
- © 2015, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - S. Timoshenkov AU - V. Kalugin AU - A. Shalimov AU - A. Timoshenkov AU - M. Golovinskiy AU - S. Berezueva PY - 2015/07 DA - 2015/07 TI - Measurement of Capacitive Accelerometer with Decreased Nonlinearity of Static Characteristic BT - Proceedings of the 2015 International Conference on Electrical, Automation and Mechanical Engineering PB - Atlantis Press SP - 445 EP - 447 SN - 2352-5401 UR - https://doi.org/10.2991/eame-15.2015.126 DO - 10.2991/eame-15.2015.126 ID - Timoshenkov2015/07 ER -