Design and Implementation of Ion Implantation and Deposition Signal Generator Based on PLC and Touch Screen

DOI

10.2991/cmsa-18.2018.89How to use a DOI?

Keywords

signal generator; PLC; touch screen; communication

Abstract

In order to improve ion implantation and deposition signal generator to make it more stable and convenient, take advantage of the great anti-jamming characteristic of PLC and the convenient usage of touch screen, use the pulse output and high-speed counter ability of PLC and communication ability of the touch screen, to realize the pulse output and parameter control. This device can generator two high-speed pulse (main arc pulse and the bias pulse) at the same time, enabling 4 parameters measured in microsecond, which are named the main arc pulse width, the bias arc pulse width, frequency and the delay time respectively. The final designed PLC and touch screen can work normally and have been applied to the original generator now as the source of pulse signal.

Copyright

© 2018, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Weiquan Shu
PY  - 2018/04
DA  - 2018/04
TI  - Design and Implementation of Ion Implantation and Deposition Signal Generator Based on PLC and Touch Screen
BT  - Proceedings of the 2018 International Conference on Computer Modeling, Simulation and Algorithm (CMSA 2018)
PB  - Atlantis Press
SP  - 392
EP  - 395
SN  - 1951-6851
UR  - https://doi.org/10.2991/cmsa-18.2018.89
DO  - 10.2991/cmsa-18.2018.89
ID  - Shu2018/04
ER  -