The Finite Element Analysis of the Vacuum Magnetron Sputtering Coating Chamber

DOI

10.2991/ameii-15.2015.309How to use a DOI?

Keywords

Vacuum magnetron sputtering; Coating chamber; Finite element analysis.

Abstract

In this paper, the vacuum magnetron sputtering coating chamber was as the research object. The three-dimensional model of the coating chamber shell was established by using Sold Works software. The model of the coating chamber shell was imported into the ANSYS finite element software. The finite element model was established and carried on the static analysis. The coating chamber structure improved is proposed, improved coating chamber shell after the design has obviously improved in stability and reliability, to provide theoretical basis for design.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Jie Wu
AU  - Shanpeng Sun
AU  - Dongzheng Wang
PY  - 2015/04
DA  - 2015/04
TI  - The Finite Element Analysis of the Vacuum Magnetron Sputtering Coating Chamber
BT  - Proceedings of the International Conference on Advances in Mechanical Engineering and Industrial Informatics
PB  - Atlantis Press
SP  - 1665
EP  - 1668
SN  - 2352-5401
UR  - https://doi.org/10.2991/ameii-15.2015.309
DO  - 10.2991/ameii-15.2015.309
ID  - Wu2015/04
ER  -