Research on MEMS Cantilever Beam Used as Switch in Thermal Mass Flow Meter

DOI

10.2991/amcce-15.2015.23How to use a DOI?

Keywords

Cantilever; MEMS; Flow meter; Switch

Abstract

In order to reduce power consumption of thermal mass flow meter and prolong its working life as long as possible, we suppose that a MEMS cantilever beam could be used as switch in thermal mass flow meter. First, we discussed working principle of cantilever beam to confirm the feasibility as switch in circuit. Second, we analyzed its property by using the simulation model. The simulation results show that the bending degree of cantilever beam is not only associated with young's modulus of materials, and also related to cantilever size such as length, thickness and length to width ratio. Therefore, if we can choice suitable material and design reasonable dimension, the MEMS cantilever beam may be used as switch.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Pengyu Wang
PY  - 2015/04
DA  - 2015/04
TI  - Research on MEMS Cantilever Beam Used as Switch in Thermal Mass Flow Meter
BT  - Proceedings of the 2015 International Conference on Automation, Mechanical Control and Computational Engineering
PB  - Atlantis Press
SP  - 129
EP  - 134
SN  - 1951-6851
UR  - https://doi.org/10.2991/amcce-15.2015.23
DO  - 10.2991/amcce-15.2015.23
ID  - Wang2015/04
ER  -