Videometrics-based Detection of Vibration Linearity in MEMS Gyroscope

DOI

10.2991/ijcis.2011.4.3.5How to use a DOI?

Keywords

MEMS gyroscope, videometrics, vibration system, linearity

Abstract

MEMS gyroscope performs as a sort of sensor to detect angular velocity, with diverse applications in engineering including vehicle and intelligent traffic etc. A balanced vibration of driving module excited by electrostatic driving signal is the base MEMS gyroscope's performance. In order to analyze the linear property of vibration in MEMS Gyroscope, a method of computer vision measuring is applied with the help of high-speed vidicon to obtain video of linear vibration of driving module in gyroscope, under the driving voltage signal of inherent frequency and amplitude linearly increasing. By means of image processing, target identifying, and motion parameter extracting from the obtained video, vibration curve with time variation is acquired. And then, linearity of this vibration system can be analyzed by focusing on the amplitude value of vibration responding to the amplitude variation of driving voltage signal.

Copyright

© 2011, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - JOUR
AU  - Yong Zhou
AU  - Haigang Sun
AU  - Shiqiao Gao
AU  - Shaohua Niu
PY  - 2011
DA  - 2011/05/01
TI  - Videometrics-based Detection of Vibration Linearity in MEMS Gyroscope
JO  - International Journal of Computational Intelligence Systems
SP  - 321
EP  - 328
VL  - 4
IS  - 3
SN  - 1875-6883
UR  - https://doi.org/10.2991/ijcis.2011.4.3.5
DO  - 10.2991/ijcis.2011.4.3.5
ID  - Zhou2011
ER  -